In this paper, the new lapping slurry and sharpening slurry are released. As well as the deliquescence degree of CLBO is fallen to cheapest. A whole new Doing work technologies is likewise adopted. After rough polishing, the concentration of extremely-precision polishing slurry is improved effectively. So does the ultra-precision sprucing pace, and also the wiping pace is quicker than the deliquescence velocity. The CLBO crystal surface roughness can obtain 1nm and keep the surface area high quality perfectly. Obtain through your institution
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As an example, the current concave OC could get replaced by a plane mirror which could mitigate the facility density to the surface area of M1 and also the diamond. What's more, employing significant damage threshold coatings for M1 and diamond would also improve the output power with no damages. Then, the NIR laser with the 2nd Stokes wavelength might be superior ample, in addition to its superior beam good quality, to produce the ultimate DUV laser at 193 nm with a high regular electric power.
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Due to the thermal lens outcome from the reliable-state lasers, If your heating management is inadequate, It isn't easy to get the sound-point out laser using a higher power along with a higher beam high quality simultaneously. Just lately, with the development of The skinny disk laser and one-crystal fiber (SCF) laser, a high-power laser at the elemental wavelength (one μm) were realized with an excellent beam excellent Despite having a TEM00 mode beam [4,24], which would be excellent candidates for the basic in the DUV laser generation. One more prospect for the elemental is definitely the high-energy fiber laser which might be achieved by coherent beam mixture with M2 price under 1.
On the opposite facet, the ability scaling on the NIR laser is an additional element to improve the normal power in the 193-nm DUV laser. Due to not enough the higher-ability amplification Resolution from the NIR laser (by way of example at 1553 nm), nonlinear frequency procedures which include optical parameter oscillation (OPO) could be applied to develop a wavelength converter click here by shifting the wavelength from one μm to the desired wavelength and getting relative increased power [21]. Just lately, a diamond Raman laser confirmed its skill in acquiring a higher electrical power as well as a high conversion performance for the 1st Stokes with the 1-μm laser [22,23], which implies the possibility to be used while in the 193-nm DUV laser generation due to its superior Raman get and large frequency change.
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The beam profile proven in Determine 7b demonstrated a superb beam quality as among the merits of Raman laser, which would be helpful to generate a 193-nm DUV laser with a top quality beam.
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The development on the 193-nm laser was shown by stages of SFG. In an effort to scale the DUV laser ability proficiently, a brand new strategy from the 193-nm DUV laser era is introduced according to the diamond Raman laser.